2/2/2010	9:13:16 AM	SiCl4 MFC set to  325.000000
2/2/2010	9:13:29 AM	SiCl4 MFC set to  0.000000
2/2/2010	9:13:45 AM	SiCl4 pre valve opened
2/2/2010	9:13:53 AM	SiCl4 MFC set to  325.000000
2/2/2010	9:14:05 AM	SiCl4 pre valve closed
2/2/2010	9:14:07 AM	SiCl4 pre valve opened
2/2/2010	9:14:13 AM	SiCl4 MFC set to  0.000000
2/2/2010	9:15:51 AM	SiCl4 pre valve closed
2/2/2010	9:15:58 AM	SiCl4 pre valve opened
2/2/2010	9:16:13 AM	Helium MFC set to  0.000000
2/2/2010	9:16:15 AM	Helium valve opened
2/2/2010	9:16:27 AM	Helium MFC set to  50.000000
2/2/2010	9:17:03 AM	Helium MFC set to  200.000000
2/2/2010	9:17:25 AM	Helium MFC set to  0.000000
2/2/2010	9:17:26 AM	Helium valve closed
2/2/2010	9:17:55 AM	SiCl4 MFC set to  100.000000
2/2/2010	9:18:04 AM	SiCl4 MFC set to  0.000000
2/2/2010	9:18:06 AM	SiCl4 pre valve closed
2/2/2010	9:18:11 AM	SiCl4 pre valve opened
2/2/2010	9:18:17 AM	SiCl4 pre valve closed
2/2/2010	9:18:23 AM	SiCl4 pre valve opened
2/2/2010	9:18:32 AM	SiCl4 MFC set to  1.000000
2/2/2010	9:18:47 AM	SiCl4 MFC set to  5.000000
2/2/2010	9:18:53 AM	SiCl4 MFC set to  10.000000
2/2/2010	9:19:04 AM	SiCl4 MFC set to  20.000000
2/2/2010	9:19:21 AM	SiCl4 MFC set to  50.000000
2/2/2010	9:19:32 AM	SiCl4 MFC set to  0.000000
2/2/2010	9:19:56 AM	SiCl4 MFC set to  50.000000
2/2/2010	9:20:11 AM	SiCl4 MFC set to  0.000000
2/2/2010	9:20:14 AM	SiCl4 pre valve closed
2/2/2010	9:46:31 AM	SiCl4 pre valve opened
2/2/2010	9:46:35 AM	SiCl4 pre valve closed
2/2/2010	9:46:37 AM	SiCl4 pre valve opened
2/2/2010	9:46:40 AM	SiCl4 pre valve closed
2/2/2010	9:46:42 AM	SiCl4 pre valve opened
2/2/2010	9:46:52 AM	SiCl4 MFC set to  325.000000
2/2/2010	9:47:02 AM	SiCl4 pre valve closed
2/2/2010	9:47:04 AM	SiCl4 pre valve opened
2/2/2010	9:47:12 AM	SiCl4 pre valve closed
2/2/2010	9:47:27 AM	Helium valve opened
2/2/2010	9:47:32 AM	Helium valve closed
2/2/2010	9:57:40 AM	Helium MFC set to  100.000000
2/2/2010	9:57:47 AM	Helium MFC set to  300.000000
2/2/2010	9:57:52 AM	Helium MFC set to  0.000000
2/2/2010	9:58:19 AM	H2 MFC set to  100.000000
2/2/2010	9:58:26 AM	H2 MFC set to  500.000000
2/2/2010	9:58:31 AM	H2 MFC set to  0.000000
2/2/2010	11:05:40 AM	SiCl4 MFC set to  0.000000
2/2/2010	11:05:47 AM	SiCl4 MFC set to  100.000000
2/2/2010	11:05:53 AM	SiCl4 MFC set to  0.000000
2/2/2010	11:07:46 AM	SiCl4 pre valve opened
2/2/2010	11:07:47 AM	SiCl4 pre valve closed
2/2/2010	11:08:50 AM	Bypass valve closed
2/2/2010	11:08:50 AM	Main Vac valve closed
2/2/2010	11:12:09 AM	Program started after a nonstandard shutdown
2/2/2010	11:12:15 AM	Helium valve opened
2/2/2010	11:12:17 AM	Helium valve closed
2/2/2010	11:12:18 AM	Helium valve opened
2/2/2010	11:12:19 AM	Helium valve closed
2/2/2010	11:12:23 AM	Helium valve opened
2/2/2010	11:12:24 AM	Helium valve closed
2/2/2010	11:12:28 AM	SiCl4 pre valve opened
2/2/2010	11:12:31 AM	SiCl4 pre valve closed
2/2/2010	11:12:36 AM	SiCl4 pre valve opened
2/2/2010	11:12:39 AM	SiCl4 pre valve closed
2/2/2010	11:12:57 AM	SiCl4 pre valve opened
2/2/2010	11:13:01 AM	SiCl4 pre valve closed
2/2/2010	11:13:42 AM	SiCl4 pre valve opened
2/2/2010	11:13:52 AM	SiCl4 MFC set to  100.000000
2/2/2010	11:14:21 AM	SiCl4 MFC set to  325.000000
2/2/2010	11:14:27 AM	SiCl4 pre valve closed
2/2/2010	11:15:25 AM	SiCl4 pre valve opened
2/2/2010	11:15:58 AM	Bypass valve opened
2/2/2010	11:15:58 AM	Main Vac valve opened
2/2/2010	11:16:26 AM	SiCl4 pre valve closed
2/2/2010	11:16:36 AM	SiCl4 pre valve opened
2/2/2010	11:17:52 AM	SiCl4 pre valve closed
2/2/2010	11:18:04 AM	SiCl4 MFC set to  0.000000
2/2/2010	11:18:05 AM	SiCl4 pre valve opened
2/2/2010	11:18:07 AM	SiCl4 pre valve closed
2/2/2010	11:23:00 AM	SiCl4 pre valve opened
2/2/2010	11:23:06 AM	SiCl4 MFC set to  500.000000
2/2/2010	11:23:26 AM	SiCl4 MFC set to  325.000000
2/2/2010	11:23:30 AM	Main Vac valve closed
2/2/2010	11:25:15 AM	SiCl4 pre valve closed
2/2/2010	11:25:16 AM	Main Vac valve opened
2/2/2010	11:25:18 AM	Bypass valve closed
2/2/2010	11:25:18 AM	Main Vac valve closed
2/2/2010	11:29:17 AM	SiCl4 pre valve opened
2/2/2010	11:29:42 AM	SiCl4 pre valve closed
2/2/2010	11:36:38 AM	Bypass valve opened
2/2/2010	11:37:11 AM	Main Vac valve opened
2/2/2010	11:37:29 AM	Bypass valve closed
2/2/2010	11:37:29 AM	Main Vac valve closed
2/2/2010	11:37:35 AM	Main Vac valve opened
2/2/2010	11:37:37 AM	Bypass valve opened
2/2/2010	11:40:12 AM	Bypass valve closed
2/2/2010	11:40:12 AM	Main Vac valve closed
2/2/2010	11:40:25 AM	Main Vac valve opened
2/2/2010	11:40:26 AM	Bypass valve opened
2/2/2010	11:40:30 AM	Helium valve opened
2/2/2010	11:41:10 AM	Helium MFC set to  200.000000
2/2/2010	11:45:04 AM	Helium valve closed
2/2/2010	11:54:40 AM	Bypass valve closed
2/2/2010	11:54:41 AM	Main Vac valve closed
2/2/2010	11:54:52 AM	Bypass valve opened
2/2/2010	11:54:53 AM	Main Vac valve opened
2/2/2010	1:25:30 PM	Bypass valve closed
2/2/2010	1:25:30 PM	Main Vac valve closed
2/2/2010	1:25:42 PM	Bypass valve opened
2/2/2010	1:25:43 PM	Main Vac valve opened
